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    • Ionization Solution to plasma damage or de-chuck in dry Etcher
    • Ionization Solution to Wafer cleaning_spin drying equipment
    • Patented EOS Evaluation Apparatus of atm pressure plasma equipment
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      • Vacuum Electrostatics Mitigation by Photo Ionization
    • Electrostatics Measurement of High Pressure Fluid Rinsing Processes

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News

  • LEAN ESD embarked the unique Electrostatic control support to photomask manufacturing industry 2025-01-22
  • SEMI Industry shall have the Full View of Electrostatics Impacts on Photomask 2026-10-13

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  • Address:403# of Block 3 at No.728 of Kaichuang Avenue, Huangpu District, Guangzhou City, China

  • Tel: +86 20-8200 6400

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  • Email:copper_hou@leanesd.com

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Product Categories

  • Ionization Solution to plasma damage or de-chuck in dry Etcher
  • Ionization Solution to Wafer cleaning_spin drying equipment
  • Patented EOS Evaluation Apparatus of atm pressure plasma equipment
  • Electrostatic Solution in Vacuum Systems
  • Electrostatics Measurement of High Pressure Fluid Rinsing Processes

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Contact Us

403# of Block 3 at No.728 of Kaichuang Avenue, Huangpu District, Guangzhou City, China

+86 20-8200 6400

copper_hou@leanesd.com

Latest News

  • LEAN ESD embarked the unique Electrostatic control support to photomask manufacturing industry
  • SEMI Industry shall have the Full View of Electrostatics Impacts on Photomask

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